Search 1556 plasma ALD publications by:
Search 1556 plasma ALD publications by:
Atomic Layer Epitaxy of Group IV Materials: Surface Processes, Thin Films, Devices and Their Characterization
Type:
Other
Info:
Final technical report to Office of the Chief of Naval Research
Date:
1996-09-01
Author Information
Name | Institution |
---|---|
R. F. Davis | North Carolina State University |
S. Bedair | North Carolina State University |
N. A. El-Masry | North Carolina State University |
Z. Sitar | North Carolina State University |
Films
Film/Plasma Properties
Characteristic: Transistor Characteristics
Analysis: Transistor Characterization
Substrates
Silicon |
Keywords
Notes
1192 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |