Publication Information

Title:
Atomic Layer Epitaxy of Group IV Materials: Surface Processes, Thin Films, Devices and Their Characterization
Type:
Other
Info:
Final technical report to Office of the Chief of Naval Research
Date:
1996-09-01

Author Information

Name Institution
R. F. DavisNorth Carolina State University
S. BedairNorth Carolina State University
N. A. El-MasryNorth Carolina State University
Z. SitarNorth Carolina State University

Films

Plasma SiC


Film/Plasma Properties

Characteristic: Transistor Characteristics
Analysis: Transistor Characterization

Substrates

Silicon

Keywords

Notes

1192