Search 1531 plasma ALD publications by:
Search 1531 plasma ALD publications by:
TEA, Al(C2H5)3, AlEt3, Triethyl Aluminum, CAS# 97-93-8
Where to buy
Number | Vendor | Link |
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1 | Strem Chemicals, Inc. | Triethylaluminum, elec. gr. (99.999+%-Al) PURATREM **S.Steel Cyl Extra** |
2 | Strem Chemicals, Inc. | Triethylaluminum, min. 93% |
Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
Number | Title |
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1 | Atomic Layer Epitaxy of Group IV Materials: Surface Processes, Thin Films, Devices and Their Characterization |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |