Z. Sitar Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Z. Sitar returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Layer-by-layer epitaxial growth of GaN at low temperatures|
|2||Atomic Layer Epitaxy of Group IV Materials: Surface Processes, Thin Films, Devices and Their Characterization|