Your search for plasma enhanced atomic layer deposition publications using Custom Rotary hardware returned 4 records. If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects|
|2||Atomic layer deposition of ultrathin platinum films on tungsten atomic layer deposition adhesion layers: Application to high surface area substrates|
|3||Plasma Enhanced Atomic Layer Deposition on Powders|
|4||Thermal and Plasma-Enhanced Atomic Layer Deposition of TiN Using TDMAT and NH3 on Particles Agitated in a Rotary Reactor|
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