2021 Year in Review
The publication database currently has 1616 entries.
Search from:
202 Films Compositions
272 Precursors and Plasma Gases
77 Deposition Hardwares
250 Film and Plasma Characteristics
88 Theses
Use Advanced Search for more complex searches and for searching by other criteria (author, affiliation, analysis, deposition temperature)
ALD Links
Contact Us
Advertising
Recent Database Additions
Tailoring angular selectivity in SiO2 slanted columnar thin films using atomic layer deposition of titanium nitride
Characterization of Molybdenum Oxide Thin Films Grown by Atomic Layer Deposition
Thermal Interface Enhancement via Inclusion of an Adhesive Layer Using Plasma-Enhanced Atomic Layer Deposition
Search 1616 plasma ALD publications by:
Search 1616 plasma ALD publications by:
Supportless Platinum Nanotubes Array by Atomic Layer Deposition as PEM Fuel Cell Electrode
Type:
Journal
Info:
Electrochimica Acta Volume 125, 2014, Pages 107 - 116
Date:
2014-01-10
Author Information
| Name | Institution |
|---|---|
| S. Galbiati | CEA - Grenoble |
| A. Morin | CEA - Grenoble |
| N. Pauc | CEA - Grenoble |
Films
Plasma Pt
Thermal Al2O3
Film/Plasma Properties
Substrates
| AAO, Anodic Aluminum Oxide |
Keywords
Notes
| 374 |