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Characterization of thin Al2O3/SiO2 dielectric stack for CMOS transistors
Designing Multifunctional Cobalt Oxide Layers for Efficient and Stable Electrochemical Oxygen Evolution
Hierarchical Atomic Layer Deposited V2O5 on 3D Printed Nanocarbon Electrodes for High-Performance Aqueous Zinc-Ion Batteries
Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition
Experimental and numerical analysis of the effects of ion bombardment in silicon oxide (SiO2) plasma enhanced atomic layer deposition (PEALD) processes
Supportless Platinum Nanotubes Array by Atomic Layer Deposition as PEM Fuel Cell Electrode
Type:
Journal
Info:
Electrochimica Acta Volume 125, 2014, Pages 107 - 116
Date:
2014-01-10
Author Information
| Name | Institution |
|---|---|
| S. Galbiati | CEA - Grenoble |
| A. Morin | CEA - Grenoble |
| N. Pauc | CEA - Grenoble |
Films
Plasma Pt
Thermal Al2O3
Film/Plasma Properties
Substrates
| AAO, Anodic Aluminum Oxide |
Keywords
Notes
| 374 |