The publication database currently has 1695 entries.
Use Advanced Search for more complex searches
Recent Database Additions
Infrared single-photon sensitivity in atomic layer deposited superconducting nanowires
Effects of deposition temperature on the wear behavior and material properties of plasma enhanced atomic layer deposition (PEALD) titanium vanadium nitride thin films
Gallium nitride thin films by microwave plasma-assisted ALD
Ferroelectricity of HfxZr1-xO2 thin films fabricated by 300°C low temperature process with plasma-enhanced atomic layer deposition
Hydrogen-induced abstraction mechanism of surface methyl groups in atomic-layer-epitaxy of germanium
Supportless Platinum Nanotubes Array by Atomic Layer Deposition as PEM Fuel Cell Electrode
Type:
Journal
Info:
Electrochimica Acta Volume 125, 2014, Pages 107 - 116
Date:
2014-01-10
Author Information
| Name | Institution |
|---|---|
| S. Galbiati | CEA - Grenoble |
| A. Morin | CEA - Grenoble |
| N. Pauc | CEA - Grenoble |
Films
Plasma Pt
Thermal Al2O3
Film/Plasma Properties
Substrates
| AAO, Anodic Aluminum Oxide |
Notes
| 374 |