Publication Information

Title: Supportless Platinum Nanotubes Array by Atomic Layer Deposition as PEM Fuel Cell Electrode

Type: Journal

Info: Electrochimica Acta Volume 125, 2014, Pages 107 - 116

Date: 2014-01-10

DOI: http://dx.doi.org/10.1016/j.electacta.2014.01.061

Author Information

Name

Institution

S. Galbiati

CEA - Grenoble

A. Morin

CEA - Grenoble

N. Pauc

CEA - Grenoble

Films

Plasma Pt using Veeco - Ultratech - Cambridge NanoTech Fiji

Deposition Temperature = 250C

(Trimethyl)methylcyclopentadienylplatinum, MeCpMe3Pt

94442-22-5

Where to buy precursor

O2, Oxygen

7782-44-7

Thermal Al2O3 using Veeco - Ultratech - Cambridge NanoTech Fiji

Deposition Temperature = 250C

TMA, AlMe3, Trimethyl Aluminum

75-24-1

Where to buy precursor

H2O, Water

7732-18-5

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Substrates

AAO, Anodic Aluminum Oxide

Keywords

Notes

374


Mark Sowa

Shortcuts

Films
Precursors
Deposition Hardware
Film and Plasma Characteristics
Multi-factor Search
ALD and PEALD Background
On-line PEALD Theses
About plasma-ald.com

Contact Us
ALD Links

© 2014-2020 plasma-ald.com