Metallic nanoparticle-based strain sensors elaborated by atomic layer deposition
Type:
Journal
Info:
Applied Physics Letters 110, 123103 (2017)
Date:
2017-03-20
Author Information
| Name | Institution |
|---|---|
| Etienne Puyoo | Université Lyon |
| Christophe Malhaire | Université Lyon |
| Daniel Thomas | Université Lyon |
| Rémi Rafaël | Université Lyon |
| Mohamed R'Mili | Université Lyon |
| Annie Malchère | Université Lyon |
| Lucian Roiban | Université Lyon |
| Siddardha Koneti | Université Lyon |
| Matthieu Bugnet | Université Lyon |
| Andreï Sabac | Université Lyon |
| M. Le Berre | Université Lyon |
Films
Plasma Pt
Thermal Al2O3
Film/Plasma Properties
Characteristic: Images
Analysis: TEM, Transmission Electron Microscope
Characteristic: Particle Size Distribution
Analysis: TEM, Transmission Electron Microscope
Characteristic: Images
Analysis: TEM, Transmission Electron Microscope
Substrates
| Al2O3 |
| SiO2 |
| Polyimide |
Notes
| 1410 |