Publication Information

Title:
Metallic nanoparticle-based strain sensors elaborated by atomic layer deposition
Type:
Journal
Info:
Applied Physics Letters 110, 123103 (2017)
Date:
2017-03-20

Author Information

Name Institution
Etienne PuyooUniversité Lyon
Christophe MalhaireUniversité Lyon
Daniel ThomasUniversité Lyon
Rémi RafaëlUniversité Lyon
Mohamed R'MiliUniversité Lyon
Annie MalchèreUniversité Lyon
Lucian RoibanUniversité Lyon
Siddardha KonetiUniversité Lyon
Matthieu BugnetUniversité Lyon
Andreï SabacUniversité Lyon
M. Le BerreUniversité Lyon

Films


Thermal Al2O3


Film/Plasma Properties

Characteristic: Images
Analysis: TEM, Transmission Electron Microscope

Characteristic: Particle Size Distribution
Analysis: TEM, Transmission Electron Microscope

Characteristic: Images
Analysis: TEM, Transmission Electron Microscope

Substrates

Al2O3
SiO2
Polyimide

Keywords

Nanoparticle Growth
Sensors

Notes

1410