Bis(cyclopentadienyl)ruthenium, Ruthenocene, Cp2Ru, (C5H5)2Ru, CAS# 1287-13-4

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1EreztechBis(cyclopentadienyl) ruthenium

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Radical Enhanced Atomic Layer Deposition of Metals and Oxides
2Structural investigation of Ru/Pt nanocomposite films prepared by plasma-enhanced atomic layer depositions
3Thermal and plasma enhanced atomic layer deposition ruthenium and electrical characterization as a metal electrode
4Emerging Atomic Layer Deposition (ALD) Processes For Low Thermal Budget Flexible Electronics
5Radical Enhanced Atomic Layer Deposition of Metals and Oxides