Search 1531 plasma ALD publications by:
Search 1531 plasma ALD publications by:
Publication Information
Title:
Formation of Ru nanocrystals by plasma enhanced atomic layer deposition for nonvolatile memory applications
Type:
Journal
Info:
Applied Physics Letters 89, 093115 (2006)
Date:
2006-07-03
Author Information
Name | Institution |
---|---|
Sung-Soo Yim | Seoul National University |
Moon-Sang Lee | Seoul National University |
Ki-Su Kim | Seoul National University |
Ki-Bum Kim | Seoul National University |
Films
Plasma Ru
Film/Plasma Properties
Characteristic: Images
Analysis: TEM, Transmission Electron Microscope
Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Resistivity, Sheet Resistance
Analysis: -
Characteristic: Unknown
Analysis: C-V, Capacitance-Voltage Measurements
Substrates
SiO2 |
Keywords
Nucleation |
Notes
1005 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |