Moon-Sang Lee Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Moon-Sang Lee returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Formation of Ru nanocrystals by plasma enhanced atomic layer deposition for nonvolatile memory applications|
|2||Atomic Layer Deposition of Ru Nanocrystals with a Tunable Density and Size for Charge Storage Memory Device Application|