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An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
  • Thin Film Etch
  • Surface cleaning
  • Surface modification

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Sung-Soo Yim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sung-Soo Yim returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic Layer Deposition of Ru Nanocrystals with a Tunable Density and Size for Charge Storage Memory Device Application
2Formation of Ru nanocrystals by plasma enhanced atomic layer deposition for nonvolatile memory applications
3A Bilayer Diffusion Barrier of ALD-Ru/ALD-TaCN for Direct Plating of Cu