Search 1531 plasma ALD publications by:
Search 1531 plasma ALD publications by:
Publication Information
Title:
Atomic Layer Deposition of Ru Nanocrystals with a Tunable Density and Size for Charge Storage Memory Device Application
Type:
Journal
Info:
Electrochemical and Solid-State Letters, 11 (9) K89-K92 (2008)
Date:
2008-05-12
Author Information
Name | Institution |
---|---|
Sung-Soo Yim | Seoul National University |
Do-Joong Lee | Seoul National University |
Ki-Su Kim | Seoul National University |
Moon-Sang Lee | Seoul National University |
Soo-Hyun Kim | Yeungnam University |
Ki-Bum Kim | Seoul National University |
Films
Plasma Ru
Thermal Ru
Film/Plasma Properties
Characteristic: Nucleation
Analysis: TEM, Transmission Electron Microscope
Substrates
SiO2 |
Keywords
Nucleation |
Notes
1191 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |