2021 Year in Review
The publication database currently has 1616 entries.
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202 Films Compositions
272 Precursors and Plasma Gases
77 Deposition Hardwares
250 Film and Plasma Characteristics
88 Theses
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Tailoring angular selectivity in SiO2 slanted columnar thin films using atomic layer deposition of titanium nitride
Characterization of Molybdenum Oxide Thin Films Grown by Atomic Layer Deposition
Thermal Interface Enhancement via Inclusion of an Adhesive Layer Using Plasma-Enhanced Atomic Layer Deposition
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Atomic Layer Deposition of Ru Nanocrystals with a Tunable Density and Size for Charge Storage Memory Device Application
Type:
Journal
Info:
Electrochemical and Solid-State Letters, 11 (9) K89-K92 (2008)
Date:
2008-05-12
Author Information
| Name | Institution |
|---|---|
| Sung-Soo Yim | Seoul National University |
| Do-Joong Lee | Seoul National University |
| Ki-Su Kim | Seoul National University |
| Moon-Sang Lee | Seoul National University |
| Soo-Hyun Kim | Yeungnam University |
| Ki-Bum Kim | Seoul National University |
Films
Plasma Ru
Thermal Ru
Film/Plasma Properties
Characteristic: Nucleation
Analysis: TEM, Transmission Electron Microscope
Substrates
| SiO2 |
Keywords
| Nucleation |
Notes
| 1191 |