Atomic Layer Deposition of Ru Nanocrystals with a Tunable Density and Size for Charge Storage Memory Device Application
Type:
Journal
Info:
Electrochemical and Solid-State Letters, 11 (9) K89-K92 (2008)
Date:
2008-05-12
Author Information
| Name | Institution |
|---|---|
| Sung-Soo Yim | Seoul National University |
| Do-Joong Lee | Seoul National University |
| Ki-Su Kim | Seoul National University |
| Moon-Sang Lee | Seoul National University |
| Soo-Hyun Kim | Yeungnam University |
| Ki-Bum Kim | Seoul National University |
Films
Plasma Ru
Thermal Ru
Film/Plasma Properties
Characteristic: Nucleation
Analysis: TEM, Transmission Electron Microscope
Substrates
| SiO2 |
Notes
| 1191 |