ASM Genitech PEALD Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using ASM Genitech PEALD hardware returned 18 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	A low-temperature-grown TiO2 -based device for the flexible stacked RRAM application
2	Atomic Layer Deposition of Ru Nanocrystals with a Tunable Density and Size for Charge Storage Memory Device Application
3	Characteristics of TiO2 Films Prepared by ALD With and Without Plasma
4	Characteristics of ZnO Thin Films by Means of Plasma Enhanced Atomic Layer Deposition
5	Characterization of AlON-TiON Stacked Insulators For ZnS:Mn Thin Film Electroluminescent Devices
6	Effect of plasma and heat treatment on silicon dioxide films by plasma-enhanced atomic layer deposition
7	Electrical properties of Ga2O3-based dielectric thin films prepared by plasma enhanced atomic layer deposition (PEALD)
8	Flexible Memristive Memory Array on Plastic Substrates
9	Formation of Ru nanocrystals by plasma enhanced atomic layer deposition for nonvolatile memory applications
10	Growth behavior and film properties of titanium dioxide by plasma-enhanced atomic layer deposition with discrete feeding method
11	Growth Temperature Dependence of TiO2 Thin Films Prepared by Using Plasma-Enhanced Atomic Layer Deposition Method
12	Influence of oxidant source on the property of atomic layer deposited Al2O3 on hydrogen-terminated Si substrate
13	Low Temperature Formation of Silicon Oxide Thin Films by Atomic Layer Deposition Using NH3/O2 Plasma
14	Low-temperature SiON films deposited by plasma-enhanced atomic layer deposition method using activated silicon precursor
15	Microscopic origin of bipolar resistive switching of nanoscale titanium oxide thin films
16	Plasma-Enhanced Atomic Layer Deposition of TiO2 and Al-Doped TiO2 Films Using N2O and O2 Reactants
17	Substrate Dependent Growth Rate of Plasma-Enhanced Atomic Layer Deposition of Titanium Oxide Using N2O Gas
18	The Formation of an Almost Full Atomic Monolayer via Surface Modification by N2O-Plasma in Atomic Layer Deposition of ZrO2 Thin Films

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