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Microscopic origin of bipolar resistive switching of nanoscale titanium oxide thin films
Type:
Journal
Info:
Applied Physics Letters 95, 162108 (2009)
Date:
2009-09-01
Author Information
| Name | Institution |
|---|---|
| Hu Young Jeong | Korea Advanced Institute of Science and Technology |
| Jeong Yong Lee | Korea Advanced Institute of Science and Technology |
| Sung-Yool Choi | Electronics and Telecommunication Research Institute, (ETRI) |
| Jeong Won Kim | Korea Research Institute of Standards and Science (KRISS) |
Films
Plasma TiO2
Hardware used: ASM Genitech PEALD
Film/Plasma Properties
Characteristic: Resistive Switching
Analysis: I-V, Current-Voltage Measurements
Characteristic: Microstructure
Analysis: TEM, Transmission Electron Microscope
Characteristic: Thickness
Analysis: TEM, Transmission Electron Microscope
Characteristic: Interfacial Layer
Analysis: TEM, Transmission Electron Microscope
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Bonding States
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Chemical Composition, Impurities
Analysis: ELS, EELS, Electron Energy Loss Spectroscopy
Substrates
Notes
| 1015 |