plasma-ald.com
  • PEALD Publication Database
    Films Precursors Hardware Authors Film and Plasma Characteristics Theses Multi-factor Search
  • Mark's LinkedIn Profile
  • About
  • Contact Us
  • ALD Links
The publication database currently has 1531 entries.
Search from:
189 Films Compositions
401 Precursors and Plasma Gases
74 Deposition Hardwares
239 Film and Plasma Characteristics
82 Theses

Use Multifactor Search for more complex searches and for searching by other criteria (author, affiliation, analysis, deposition temperature)


ALD Links
About plasma-ald.com
Contact Us
Advertising
LinkedIn Profile

Recent Database Additions
Probing the Origin and Suppression of Vertically Oriented Nanostructures of 2D WS2 Layers Edge-Site Nanoengineering of WS2 by Low-Temperature Plasma-Enhanced Atomic Layer Deposition for Electrocatalytic Hydrogen Evolution Atomic Layer Deposition of NiO to Produce Active Material for Thin-Film Lithium-Ion Batteries
Search 1531 plasma ALD publications by:
189 Films Compositions
401 Precursors and Plasma Gases
74 Deposition Hardwares
239 Film and Plasma Characteristics

Do-Joong Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Do-Joong Lee returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1A Bilayer Diffusion Barrier of ALD-Ru/ALD-TaCN for Direct Plating of Cu
2A controlled growth of WNx and WCx thin films prepared by atomic layer deposition
3Atomic layer deposited nanocrystalline tungsten carbides thin films as a metal gate and diffusion barrier for Cu metallization
4Atomic Layer Deposition of Ru Nanocrystals with a Tunable Density and Size for Charge Storage Memory Device Application
5Highly-conformal nanocrystalline molybdenum nitride thin films by atomic layer deposition as a diffusion barrier against Cu

© 2014-2021 plasma-ald.com

Popular Films
NbN
AlN
Ag
GaN
SiO2

Recently Added Films
Li3PO4
Co3P2O8
RuTa
RuC
GaAs

Popular Precursors
Bis(DiEthylAmido)Silane
Dicobalt Hexacarbonyl Tert-ButylAcetylene
Tris(DiMethylAmido) Cyclopentadienyl Hafnium
Tris(DiEthylamido) (Tert-Butylimido) Niobium
Trimethoxy(pentamethylcyclopentadienyl) Titanium

Top Authors
Erwin (W.M.M.) Kessels
Hyeongtag Jeon
Hyungjun Kim
Mauritius C. M. (Richard) van de Sanden
Christophe Detavernier