Search 1536 plasma ALD publications by:
Search 1536 plasma ALD publications by:
Publication Information
Title:
The Properties of Cu Thin Films on Ru Depending on the ALD Temperature
Type:
Journal
Info:
Journal of Nanoscience and Nanotechnology, Volume 15, Number 2, pp. 1601-1604
Date:
2015-02-01
Author Information
Name | Institution |
---|---|
Hyeong-Chul Yoon | Sungkyunkwan University |
Jin-Ha Shin | Sungkyunkwan University |
Hwa-Sun Park | Sungkyunkwan University |
Su-Jeong Suh | Sungkyunkwan University |
Films
Film/Plasma Properties
Substrates
SiO2 |
TaN |
Keywords
Diffusion Barrier |
Interconnect |
Notes
543 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |