Introducing Plasma ALD, LLC's first in-house product.

An economical, compact inductively coupled plasma source.

Ideal for:

  • Plasma-Enhanced Atomic Layer Deposition
  • Thin Film Etch
  • Surface cleaning
  • Surface modification

Contact us for more information.



Where to buy TBTDET, tert-butylimido tris(diethylamino)tantalum, Ta[NEt2]3[=N-t-Bu)3] CAS# 169896-41-7

TBTDET, tert-butylimido tris(diethylamino)tantalum, Ta[NEt2]3[=N-t-Bu)3] CAS# 169896-41-7 is available from the following source(s):

NumberVendorRegionLink
1Sigma-Aldrich, Co. LLCπŸ‡ΊπŸ‡ΈTris(diethylamido)(tert-butylimido)tantalum(V)
2Santa Cruz BiotechnologyπŸ‡ΊπŸ‡ΈTris(diethylamido)(tert-butylimido)tantalum(V)
3Alfa AesarπŸ‡ΊπŸ‡ΈTantalum tris(diethylamido)-tert-butylimide, 99.99% (metals basis)
4Pegasus ChemicalsπŸ‡¬πŸ‡§Tris(diethylamido)(tert-butylimido)tantalum(V)
5Alfa AesarπŸ‡ΊπŸ‡ΈTert-butylimido tris(diethylamido) tantalum
6EreztechπŸ‡ΊπŸ‡ΈTris(diethylamido) (tert-butylimido) tantalum(V)
7GelestπŸ‡ΊπŸ‡ΈTris(Diethylamino)(t-Butylimino) Tantalum
8Strem Chemicals, Inc.πŸ‡ΊπŸ‡Έ(t-Butylimido)tris(diethylamino)tantalum(V), min. 98% (99.99%-Ta)

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