TBTDET, tert-butylimido tris(diethylamino)tantalum, Ta[NEt2]3[=N-t-Bu)3], CAS# 169896-41-7
Where to buy
| Number | Vendor | Region | Link |
|---|---|---|---|
| 1 | Sigma-Aldrich, Co. LLC | 🇺🇸 | Tris(diethylamido)(tert-butylimido)tantalum(V) |
| 2 | Gelest | 🇺🇸 | Tris(Diethylamino)(t-Butylimino) Tantalum |
| 3 | Santa Cruz Biotechnology | 🇺🇸 | Tris(diethylamido)(tert-butylimido)tantalum(V) |
| 4 | Ereztech | 🇺🇸 | Tris(diethylamido) (tert-butylimido) tantalum(V) |
| 5 | Strem Chemicals, Inc. | 🇺🇸 | (t-Butylimido)tris(diethylamino)tantalum(V), min. 98% (99.99%-Ta) |
| 6 | Pegasus Chemicals | 🇬🇧 | Tris(diethylamido)(tert-butylimido)tantalum(V) |
| 7 | Alfa Aesar | 🇺🇸 | Tert-butylimido tris(diethylamido) tantalum |
| 8 | Alfa Aesar | 🇺🇸 | Tantalum tris(diethylamido)-tert-butylimide, 99.99% (metals basis) |
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Plasma Enhanced Atomic Layer Deposition Film Publications
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