Search 1636 plasma ALD publications by:
Search 1636 plasma ALD publications by:
TBTDET, tert-butylimido tris(diethylamino)tantalum, Ta[NEt2]3[=N-t-Bu)3], CAS# 169896-41-7
Where to buy
Number | Vendor | Region | Link |
---|---|---|---|
1 | Santa Cruz Biotechnology | πΊπΈ | Tris(diethylamido)(tert-butylimido)tantalum(V) |
2 | Sigma-Aldrich, Co. LLC | πΊπΈ | Tris(diethylamido)(tert-butylimido)tantalum(V) |
3 | Alfa Aesar | πΊπΈ | Tantalum tris(diethylamido)-tert-butylimide, 99.99% (metals basis) |
4 | Gelest | πΊπΈ | Tris(Diethylamino)(t-Butylimino) Tantalum |
5 | Ereztech | πΊπΈ | Tris(diethylamido) (tert-butylimido) tantalum(V) |
6 | EpiValence | π¬π§ | Tantalum tert-butylimido trisdiethylamide |
7 | Strem Chemicals, Inc. | πΊπΈ | (t-Butylimido)tris(diethylamino)tantalum(V), min. 98% (99.99%-Ta) |
8 | Alfa Aesar | πΊπΈ | Tert-butylimido tris(diethylamido) tantalum |
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Plasma Enhanced Atomic Layer Deposition Film Publications
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