Name

Institution

Tonmoy Chakraborty

State University of New York at Albany

Daniel V. Greenslit

State University of New York at Albany

Eric T. Eisenbraun

State University of New York at Albany

Plasma RuTaN using Custom

Deposition Temperature = 300C

Ethylcyclopentadienyl pyrrolyl ruthenium

0-0-0

TBTDET, Tert-Butylimido Tris(DiEthylamino) Tantalum, Ta[N(C₂H₅)₂]₃[=NC(CH₃)₃]

169896-41-7

Where to buy precursor

NH₃, Ammonia

7664-41-7

Characteristic

Analysis

Diagnostic

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

Thermo VG-Scientific theta probe

Morphology, Roughness, Topography

SEM, Scanning Electron Microscopy

LEO 1550

Resistivity, Sheet Resistance

Four-point Probe

Signatone SYS-301 resistivity probing system

Images

TEM, Transmission Electron Microscope

FEI Technai F20

SiO₂

Interconnect

690