Your search for plasma enhanced atomic layer deposition publications discussing RuTaN films returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Atomic layer deposition growth of a novel mixed-phase barrier for seedless copper electroplating applications|
|2||Microstructure analysis of plasma enhanced atomic layer deposition-grown mixed-phase RuTaN barrier for seedless copper electrodeposition|
|3||Nucleation and growth characteristics of electroplated Cu on plasma enhanced atomic layer deposition-grown RuTaN direct plate barriers|
I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. If you know of publications I have missed or a database entry is wrong, send me an email at: firstname.lastname@example.org
© 2014-2018 plasma-ald.com