Publication Information

Title:
Partitioning Electrostatic and Mechanical Domains in Nanoelectromechanical Relays
Type:
Journal
Info:
Journal of Microelectromechanical Systems, (Volume:PP, Issue: 99) Page(s):1
Date:
2014-07-22
DOI:
http://dx.doi.org/10.1109/JMEMS.2014.2335157

Author Information

Name Institution
M. ShavezipurStanford University

Films

Plasma TiN

Hardware used: Unknown
Deposition Temperature Range N/A

Film/Plasma Properties

Substrates

Silicon

Keywords

NEMS, NanoElectricalMechanical Systems

Notes

PEALD TiN for nanoelectromechanical relay.
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