Search 1530 plasma ALD publications by:
Search 1530 plasma ALD publications by:
Publication Information
Title:
Partitioning Electrostatic and Mechanical Domains in Nanoelectromechanical Relays
Type:
Journal
Info:
Journal of Microelectromechanical Systems, (Volume:PP, Issue: 99) Page(s):1
Date:
2014-07-22
Author Information
Name | Institution |
---|---|
M. Shavezipur | Stanford University |
Films
Film/Plasma Properties
Substrates
Silicon |
Keywords
NEMS, NanoElectricalMechanical Systems |
Notes
PEALD TiN for nanoelectromechanical relay. |
273 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |