Partitioning Electrostatic and Mechanical Domains in Nanoelectromechanical Relays

Search Plasma ALD Publication Database By...

Title: Partitioning Electrostatic and Mechanical Domains in Nanoelectromechanical Relays

Type: Journal

Info: Journal of Microelectromechanical Systems, (Volume:PP, Issue: 99) Page(s):1

Date: 2014-07-22

DOI: http://dx.doi.org/10.1109/JMEMS.2014.2335157

Name

Institution

M. Shavezipur

Stanford University

Characteristic

Analysis

Diagnostic

Silicon

NEMS, NanoElectricalMechanical Systems

PEALD TiN for nanoelectromechanical relay.

273