Search 1531 plasma ALD publications by:
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Publication Information
Title:
Improved retention times in UTBOX nMOSFETs for 1T-DRAM applications
Type:
Journal
Info:
Solid-State Electronics, Volume 97, July 2014, Pages 30-37
Date:
2014-05-06
Author Information
Name | Institution |
---|---|
K.R.A. Sasaki | University of Sao Paulo |
Films
Film/Plasma Properties
Substrates
Keywords
DRAM Electrode |
Notes
PEALD TiN for DRAM gate stack. |
261 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |