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Ideal for:
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Comparison of the Low-Frequency Noise of Bulk Triple-Gate FinFETs With and Without Dynamic Threshold Operation

Type:
Journal
Info:
IEEE ELECTRON DEVICE LETTERS, VOL. 32, NO. 11, PP. 1597-1599, 2011
Date:
2011-09-26
DOI:
http://dx.doi.org/10.1109/LED.2011.2166372

Author Information

Name Institution
Maria Gloria Cano de AndradeUniversity of Sao Paulo
Joao Antonio MartinoUniversity of Sao Paulo
Eddy SimoenIMEC
Cor ClaeysIMEC

Films

Plasma TiN

Hardware used: Unknown
Deposition Temperature Range N/A

Film/Plasma Properties

Substrates

Notes

637