Fabrication and deformation of three-dimensional hollow ceramic nanostructures
Type:
Journal
Info:
Nature Materials vol. 12, no. 10, pp. 893 - 898, 2013.
Date:
2013-07-17
Author Information
| Name | Institution |
|---|---|
| Dongchan Jang | California Institute of Technology |
| Lucas R. Meza | California Institute of Technology |
| Frank Greer | Jet Propulsion Laboratory |
| Julia R. Greer | California Institute of Technology |
Films
Plasma TiN
Film/Plasma Properties
Characteristic: Mechanical Properties
Analysis: Compression Testing
Substrates
| Photoresist |
Notes
| 596 |