Search 1525 plasma ALD publications by:
Search 1525 plasma ALD publications by:
Publication Information
Title:
Fabrication and deformation of three-dimensional hollow ceramic nanostructures
Type:
Journal
Info:
Nature Materials vol. 12, no. 10, pp. 893 - 898, 2013.
Date:
2013-07-17
Author Information
Name | Institution |
---|---|
Dongchan Jang | California Institute of Technology |
Lucas R. Meza | California Institute of Technology |
Frank Greer | Jet Propulsion Laboratory |
Julia R. Greer | California Institute of Technology |
Films
Plasma TiN
Film/Plasma Properties
Characteristic: Mechanical Properties
Analysis: Compression Testing
Substrates
Photoresist |
Keywords
Hollow Nanofibers |
Notes
596 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |