Publication Information

Title:
Fabrication and deformation of three-dimensional hollow ceramic nanostructures
Type:
Journal
Info:
Nature Materials vol. 12, no. 10, pp. 893 - 898, 2013.
Date:
2013-07-17

Author Information

Name Institution
Dongchan JangCalifornia Institute of Technology
Lucas R. MezaCalifornia Institute of Technology
Frank GreerJet Propulsion Laboratory
Julia R. GreerCalifornia Institute of Technology

Films

Plasma TiN


Film/Plasma Properties

Characteristic: Mechanical Properties
Analysis: Compression Testing

Substrates

Photoresist

Keywords

Hollow Nanofibers

Notes

596