Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Frank Greer Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Frank Greer returned 2 record(s).

NumberTitle
1Fabrication and deformation of three-dimensional hollow ceramic nanostructures
2Fundamental beam studies of radical enhanced atomic layer deposition of TiN