Title: Silicon film thickness influence on enhanced dynamic threshold UTBB SOI nMOSFETs
Type: Conference Proceedings
Info: 2014 29th Symposium on Microelectronics Technology and Devices (SBMicro)
Date: 2014-09-01
DOI: http://dx.doi.org/10.1109/SBMicro.2014.6940089
Name
Institution
University of Sao Paulo
Characteristic
Analysis
Diagnostic
Gate Metal
PEALD TiN gate electrode for MOSFETs.
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