Search 1531 plasma ALD publications by:
Search 1531 plasma ALD publications by:
Publication Information
Title:
Silicon film thickness influence on enhanced dynamic threshold UTBB SOI nMOSFETs
Type:
Conference Proceedings
Info:
2014 29th Symposium on Microelectronics Technology and Devices (SBMicro)
Date:
2014-09-01
Author Information
Name | Institution |
---|---|
K.R.A. Sasaki | University of Sao Paulo |
Films
Film/Plasma Properties
Substrates
Keywords
Gate Metal |
Notes
PEALD TiN gate electrode for MOSFETs. |
286 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |