Publication Information

Title:
Ultrathin effective TiN protective films prepared by plasma-enhanced atomic layer deposition for high performance metallic bipolar plates of polymer electrolyte membrane fuel cells
Type:
Journal
Info:
Applied Surface Science 519 (2020) 146215
Date:
2020-03-25

Author Information

Name Institution
Woo-Jae LeePusan National University
Eun-Young YunPusan National University
Han-Bo-Ram LeeIncheon National University
Suck Won HongPusan National University
Se-Hun KwonPusan National University

Films



Film/Plasma Properties

Characteristic: Thickness
Analysis: SEM, Scanning Electron Microscopy

Characteristic: Microstructure
Analysis: TEM, Transmission Electron Microscope

Characteristic: Morphology, Roughness, Topography
Analysis: TEM, Transmission Electron Microscope

Characteristic: Resistivity, Sheet Resistance
Analysis: Four-point Probe

Characteristic: Chemical Composition, Impurities
Analysis: AES, Auger Electron Spectroscopy

Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy

Characteristic: Chemical Composition, Impurities
Analysis: ELS, EELS, Electron Energy Loss Spectroscopy

Characteristic: Density
Analysis: XRR, X-Ray Reflectivity

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction

Characteristic: Corrosion
Analysis: Electrochemical Analysis

Substrates

Stainless Steel 316L
SiO2

Keywords

Corrosion

Notes

1533