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Han-Bo-Ram Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Han-Bo-Ram Lee returned 21 record(s).

NumberTitle
1Highly-conformal nanocrystalline molybdenum nitride thin films by atomic layer deposition as a diffusion barrier against Cu
2Plasma-Enhanced Atomic Layer Deposition of Ni
3Formation of Ni silicide from atomic layer deposited Ni
4A controlled growth of WNx and WCx thin films prepared by atomic layer deposition
5Plasma-Enhanced Atomic Layer Deposition of Cobalt Using Cyclopentadienyl Isopropyl Acetamidinato-Cobalt as a Precursor
6Growth characteristics and electrical properties of SiO2 thin films prepared using plasma-enhanced atomic layer deposition and chemical vapor deposition with an aminosilane precursor
7Degradation of the deposition blocking layer during area-selective plasma-enhanced atomic layer deposition of cobalt
8High-Quality Cobalt Thin Films by Plasma-Enhanced Atomic Layer Deposition
9Very high frequency plasma reactant for atomic layer deposition
10Plasma-enhanced atomic layer deposition of Co on metal surfaces
11Plasma-enhanced atomic layer deposition of SnO2 thin films using SnCl4 and O2 plasma
12In situ surface cleaning on a Ge substrate using TMA and MgCp2 for HfO2-based gate oxides
13Thermal and plasma enhanced atomic layer deposition ruthenium and electrical characterization as a metal electrode
14Wafer-scale, conformal and direct growth of MoS2 thin films by atomic layer deposition
15Effects of Cl-Based Ligand Structures on Atomic Layer Deposited HfO2
16Spontaneous Formation of Vertical Magnetic-Metal-Nanorod Arrays During Plasma-Enhanced Atomic Layer Deposition
17Self-formation of dielectric layer containing CoSi2 nanocrystals by plasma-enhanced atomic layer deposition
18Nitride mediated epitaxy of CoSi2 through self-interlayer-formation of plasma-enhanced atomic layer deposition Co
19Plasma-enhanced atomic layer deposition of Co using Co(MeCp)2 precursor
20Ultrathin effective TiN protective films prepared by plasma-enhanced atomic layer deposition for high performance metallic bipolar plates of polymer electrolyte membrane fuel cells
21Growth mechanism of Co thin films formed by plasma-enhanced atomic layer deposition using NH3 as plasma reactant