Ultrathin effective TiN protective films prepared by plasma-enhanced atomic layer deposition for high performance metallic bipolar plates of polymer electrolyte membrane fuel cells
Type:
Journal
Info:
Applied Surface Science 519 (2020) 146215
Date:
2020-03-25
Author Information
| Name | Institution |
|---|---|
| Woo-Jae Lee | Pusan National University |
| Eun-Young Yun | Pusan National University |
| Han-Bo-Ram Lee | Incheon National University |
| Suck Won Hong | Pusan National University |
| Se-Hun Kwon | Pusan National University |
Films
Plasma TiN
Plasma TiN
Hardware used: Custom Direct Capacitively Coupled Plasma
CAS#: 7550-45-0
CAS#: 7727-37-9
CAS#: 1333-74-0
Film/Plasma Properties
Characteristic: Thickness
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Microstructure
Analysis: TEM, Transmission Electron Microscope
Characteristic: Morphology, Roughness, Topography
Analysis: TEM, Transmission Electron Microscope
Characteristic: Resistivity, Sheet Resistance
Analysis: Four-point Probe
Characteristic: Chemical Composition, Impurities
Analysis: AES, Auger Electron Spectroscopy
Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy
Characteristic: Chemical Composition, Impurities
Analysis: ELS, EELS, Electron Energy Loss Spectroscopy
Characteristic: Density
Analysis: XRR, X-Ray Reflectivity
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Characteristic: Corrosion
Analysis: Electrochemical Analysis
Substrates
| Stainless Steel 316L |
| SiO2 |
Notes
| 1533 |