Plasma-enhanced atomic layer deposition for plasmonic TiN
Type:
Conference Proceedings
Info:
Proc. SPIE 9919, Nanophotonic Materials XIII
Date:
2016-10-03
Author Information
| Name | Institution |
|---|---|
| Lauren M. Otto | University of Minnesota, Twin Cities |
| Aaron T. Hammack | Lawrence Berkeley National Laboratory |
| Shaul Aloni | Lawrence Berkeley National Laboratory |
| D. Frank Ogletree | Lawrence Berkeley National Laboratory |
| Deirdre L. Olynick | Lawrence Berkeley National Laboratory |
| Scott Dhuey | Lawrence Berkeley National Laboratory |
| Bethanie J. H. Stadler | University of Minnesota, Twin Cities |
| Adam M. Schwartzberg | Lawrence Berkeley National Laboratory |
Films
Film/Plasma Properties
Characteristic: Thickness
Analysis: Ellipsometry
Characteristic: Chemical Composition, Impurities
Analysis: AES, Auger Electron Spectroscopy
Substrates
Notes
| 946 |