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An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
  • Thin Film Etch
  • Surface cleaning
  • Surface modification

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Adam M. Schwartzberg Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Adam M. Schwartzberg returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Very High Refractive Index Transition Metal Dichalcogenide Photonic Conformal Coatings by Conversion of ALD Metal Oxides
2A multifunctional biphasic water splitting catalyst tailored for integration with high-performance semiconductor photoanodes
3Plasma-enhanced atomic layer deposition for plasmonic TiN
4Atomic layer deposition for spacer defined double patterning of sub-10 nm titanium dioxide features
5High Performance CoOx/Si Photoanodes: Accessing Structural Disorder for Improved Catalytic Activity via Atomic Layer Deposition
6The important role of water in growth of monolayer transition metal dichalcogenides