Adam M. Schwartzberg Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Adam M. Schwartzberg returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic layer deposition for spacer defined double patterning of sub-10 nm titanium dioxide features
2Plasma-enhanced atomic layer deposition for plasmonic TiN
3Very High Refractive Index Transition Metal Dichalcogenide Photonic Conformal Coatings by Conversion of ALD Metal Oxides
4High Performance CoOx/Si Photoanodes: Accessing Structural Disorder for Improved Catalytic Activity via Atomic Layer Deposition
5The important role of water in growth of monolayer transition metal dichalcogenides
6A multifunctional biphasic water splitting catalyst tailored for integration with high-performance semiconductor photoanodes