Search 1531 plasma ALD publications by:
Search 1531 plasma ALD publications by:
Publication Information
Title:
Very High Refractive Index Transition Metal Dichalcogenide Photonic Conformal Coatings by Conversion of ALD Metal Oxides
Type:
Journal
Info:
Scientific Reports (2019) 9:2768
Date:
2019-01-17
Author Information
Name | Institution |
---|---|
Christopher T Chen | Lawrence Berkeley National Laboratory |
Jacopo Pedrini | Università degli Studi di Milano-Bicocca |
E. Ashley Gaulding | Lawrence Berkeley National Laboratory |
Christoph Kastl | Lawrence Berkeley National Laboratory |
Giuseppe Calafiore | Lawrence Berkeley National Laboratory |
Scott Dhuey | Lawrence Berkeley National Laboratory |
Tevye R Kuykendall | Lawrence Berkeley National Laboratory |
Stefano Cabrini | Lawrence Berkeley National Laboratory |
Francesca M. Toma | Lawrence Berkeley National Laboratory |
Shaul Aloni | Lawrence Berkeley National Laboratory |
Adam M. Schwartzberg | Lawrence Berkeley National Laboratory |
Films
Plasma WO3
Film/Plasma Properties
Substrates
SiO2 |
Keywords
Notes
1269 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |