Stefano Cabrini Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Stefano Cabrini returned 2 record(s).

Number	Title
1	Very High Refractive Index Transition Metal Dichalcogenide Photonic Conformal Coatings by Conversion of ALD Metal Oxides
2	Atomic layer deposition for spacer defined double patterning of sub-10 nm titanium dioxide features