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Very High Refractive Index Transition Metal Dichalcogenide Photonic Conformal Coatings by Conversion of ALD Metal Oxides

Type:
Journal
Info:
Scientific Reports (2019) 9:2768
Date:
2019-01-17

Author Information

Name Institution
Christopher T ChenLawrence Berkeley National Laboratory
Jacopo PedriniUniversità degli Studi di Milano-Bicocca
E. Ashley GauldingLawrence Berkeley National Laboratory
Christoph KastlLawrence Berkeley National Laboratory
Giuseppe CalafioreLawrence Berkeley National Laboratory
Scott DhueyLawrence Berkeley National Laboratory
Tevye R KuykendallLawrence Berkeley National Laboratory
Stefano CabriniLawrence Berkeley National Laboratory
Francesca M. TomaLawrence Berkeley National Laboratory
Shaul AloniLawrence Berkeley National Laboratory
Adam M. SchwartzbergLawrence Berkeley National Laboratory

Films

Plasma WO3


Film/Plasma Properties

Substrates

SiO2

Notes

1269