Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Scott Dhuey Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Scott Dhuey returned 3 record(s).

NumberTitle
1Plasma-enhanced atomic layer deposition for plasmonic TiN
2Toward an integrated device for spatiotemporal superposition of free-electron lasers and laser pulses
3Very High Refractive Index Transition Metal Dichalcogenide Photonic Conformal Coatings by Conversion of ALD Metal Oxides