Deirdre L. Olynick Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Deirdre L. Olynick returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Atomic layer deposition for spacer defined double patterning of sub-10 nm titanium dioxide features
2Plasma-enhanced atomic layer deposition for plasmonic TiN
3Toward an integrated device for spatiotemporal superposition of free-electron lasers and laser pulses