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An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
  • Thin Film Etch
  • Surface cleaning
  • Surface modification

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Deirdre L. Olynick Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Deirdre L. Olynick returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Plasma-enhanced atomic layer deposition for plasmonic TiN
2Toward an integrated device for spatiotemporal superposition of free-electron lasers and laser pulses
3Atomic layer deposition for spacer defined double patterning of sub-10 nm titanium dioxide features