Scott Dhuey Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Scott Dhuey returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Very High Refractive Index Transition Metal Dichalcogenide Photonic Conformal Coatings by Conversion of ALD Metal Oxides
2Plasma-enhanced atomic layer deposition for plasmonic TiN
3Toward an integrated device for spatiotemporal superposition of free-electron lasers and laser pulses