Scott Dhuey Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Scott Dhuey returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Plasma-enhanced atomic layer deposition for plasmonic TiN
2Very High Refractive Index Transition Metal Dichalcogenide Photonic Conformal Coatings by Conversion of ALD Metal Oxides
3Toward an integrated device for spatiotemporal superposition of free-electron lasers and laser pulses