The publication database currently has 1603 entries.
Search from:
200 Films Compositions
271 Precursors and Plasma Gases
76 Deposition Hardwares
249 Film and Plasma Characteristics
85 Theses
Use Multifactor Search for more complex searches and for searching by other criteria (author, affiliation, analysis, deposition temperature)
ALD Links
Contact Us
Advertising
Search 1603 plasma ALD publications by:
Search 1603 plasma ALD publications by:
Back-End, CMOS-Compatible Ferroelectric Field-Effect Transistor for Synaptic Weights
Type:
Journal
Info:
ACS Appl. Mater. Interfaces, 2020, 12 (15), pp 17725-17732
Date:
2020-03-20
Author Information
| Name | Institution |
|---|---|
| Mattia Halter | IBM Research, Zurich Research Lab |
| Laura Bégon-Lours | IBM Research, Zurich Research Lab |
| Valeria Bragaglia | IBM Research, Zurich Research Lab |
| Marilyne Sousa | IBM Research, Zurich Research Lab |
| Bert Jan Offrein | IBM Research, Zurich Research Lab |
| Stefan Abel | IBM Research, Zurich Research Lab |
| Mathieu Luisier | ETH Zürich |
| Jean Fompeyrine | IBM Research, Zurich Research Lab |
Films
Film/Plasma Properties
Characteristic: Chemical Composition, Impurities
Analysis: RBS, Rutherford Backscattering Spectrometry
Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy
Characteristic: Images
Analysis: TEM, Transmission Electron Microscope
Characteristic: Capacitance
Analysis: C-V, Capacitance-Voltage Measurements
Characteristic: Polarization
Analysis: P-V, Polarization-Voltage Measurements
Characteristic: Transistor Characteristics
Analysis: Transistor Characterization
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: GIXRD, Grazing Incidence X-Ray Diffraction
Substrates
| Silicon |
| TiN |
Keywords
Notes
| 1484 |