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Initial and steady-state Ru growth by atomic layer deposition studied by in situ Angle Resolved X-ray Photoelectron Spectroscopy
Innovative remote plasma source for atomic layer deposition for GaN devices
Influence of plasma species on the early-stage growth kinetics of epitaxial InN grown by plasma-enhanced atomic layer deposition
Optical in situ monitoring of plasma-enhanced atomic layer deposition process
The role of active species in the N2 and N2-H2 RF afterglows on selective surface nitriding of ALD-grown TiO2 films
Photoelectrochemical hydrogen production on silicon microwire arrays overlaid with ultrathin titanium nitride
Type:
Journal
Info:
J. Mater. Chem. A, 2016, 4, 14008-14016
Date:
2016-08-18
Author Information
| Name | Institution |
|---|---|
| Sung Kyu Choi | Kyungpook National University |
| Weon-Sik Chae | Korean Basic Science Institute |
| Bokyung Song | Daegu Gyeongbuk Institute of Science & Technology |
| Chang-Hee Cho | Daegu Gyeongbuk Institute of Science & Technology |
| Jina Choi | Korea Research Institute of Chemical Technology |
| Dong-Suk Han | Texas A&M University at Qatar |
| Wonyong Choi | Pohang University of Science and Technology (POSTECH) |
| Hyunwoong Park | Kyungpook National University |
Films
Plasma TiN
Film/Plasma Properties
Characteristic: Images
Analysis: TEM, Transmission Electron Microscope
Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: Electron Diffraction
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Characteristic: Photoluminescence
Analysis: PL, PhotoLuminescence
Characteristic: Unknown
Analysis: Linear Sweep Voltammetry
Characteristic: Unknown
Analysis: UPS, Ultraviolet Photoemission Spectroscopy
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Compositional Depth Profiling
Analysis: XPS, X-ray Photoelectron Spectroscopy
Substrates
| Silicon |
Keywords
| Photoelectrochemical (PEC) water splitting |
Notes
| 956 |