Name

Institution

Sung Kyu Choi

Kyungpook National University

Weon-Sik Chae

Korean Basic Science Institute

Bokyung Song

Daegu Gyeongbuk Institute of Science & Technology

Chang-Hee Cho

Daegu Gyeongbuk Institute of Science & Technology

Jina Choi

Korea Research Institute of Chemical Technology

Dong-Suk Han

Texas A&M University at Qatar

Wonyong Choi

Pohang University of Science and Technology (POSTECH)

Hyunwoong Park

Kyungpook National University

Plasma TiN using Quros Plus 200

Deposition Temperature = 230C

TEMATi, (EtMeN)₄Ti, [(C₂H₅)(CH₃)N]₄Ti, Tetrakis(EthylMethylAmido) Titanium, Titanium Ethylmethylamide

308103-54-0

Where to buy precursor

NH₃, Ammonia

7664-41-7

Characteristic

Analysis

Diagnostic

Images

TEM, Transmission Electron Microscope

-

Chemical Composition, Impurities

EDS, EDX, Energy Dispersive X-ray Spectroscopy

-

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

Electron Diffraction

-

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

XRD, X-Ray Diffraction

-

Photoluminescence

PL, PhotoLuminescence

-

Unknown

Linear Sweep Voltammetry

-

Unknown

UPS, Ultraviolet Photoemission Spectroscopy

-

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

-

Compositional Depth Profiling

XPS, X-ray Photoelectron Spectroscopy

-

Silicon

Photoelectrochemical (PEC) water splitting

956