Quros Plus 200 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Quros Plus 200 hardware returned 7 records.

Number	Title
1	Photoelectrochemical hydrogen production on silicon microwire arrays overlaid with ultrathin titanium nitride
2	Effects of H₂ plasma and annealing on atomic-layer-deposited Al₂O₃ films and Al/Al₂O₃/Si structures
3	Improved electrical performances of plasma-enhanced atomic layer deposited TaC_xN_y films by adopting Ar/H₂ plasma
4	Influence of Substrates on the Nucleation and Growth Behaviors of Ge₂Sb₂Te₅ Films by Combined Plasma-Enhanced Atomic Layer and Chemical Vapor Deposition
5	HfO₂/HfO_xN_y/HfO₂ Gate Dielectric Fabricated by In Situ Oxidation of Plasma-Enhanced Atomic Layer Deposition HfN Middle Layer
6	N-doped TiO₂ nanotubes coated with a thin TaO_xN_y layer for photoelectrochemical water splitting: dual bulk and surface modification of photoanodes
7	Effective work function tunability and interfacial reactions with underlying HfO₂ layer of plasma-enhanced atomic layer deposited TaC_xN_y films