Search 1536 plasma ALD publications by:
Search 1536 plasma ALD publications by:
Publication Information
Title:
DIBL in enhanced dynamic threshold operation of UTBB SOI with different drain engineering at high temperatures
Type:
Conference Proceedings
Info:
2016 31st Symposium on Microelectronics Technology and Devices (SBMicro)
Date:
2016-08-29
Author Information
Name | Institution |
---|---|
K.R.A. Sasaki | University of Sao Paulo |
Eddy Simoen | IMEC |
Cor Claeys | IMEC |
Joao Antonio Martino | University of Sao Paulo |
Films
Film/Plasma Properties
Substrates
SiO2 |
Keywords
Notes
925 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |