Publication Information

Title:
DIBL in enhanced dynamic threshold operation of UTBB SOI with different drain engineering at high temperatures
Type:
Conference Proceedings
Info:
2016 31st Symposium on Microelectronics Technology and Devices (SBMicro)
Date:
2016-08-29

Author Information

Name Institution
K.R.A. SasakiUniversity of Sao Paulo
Eddy SimoenIMEC
Cor ClaeysIMEC
Joao Antonio MartinoUniversity of Sao Paulo

Films

Plasma TiN

Hardware used: Unknown


Film/Plasma Properties

Substrates

SiO2

Keywords

Notes

925