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Infrared single-photon sensitivity in atomic layer deposited superconducting nanowires
Effects of deposition temperature on the wear behavior and material properties of plasma enhanced atomic layer deposition (PEALD) titanium vanadium nitride thin films
Gallium nitride thin films by microwave plasma-assisted ALD
Ferroelectricity of HfxZr1-xO2 thin films fabricated by 300°C low temperature process with plasma-enhanced atomic layer deposition
Hydrogen-induced abstraction mechanism of surface methyl groups in atomic-layer-epitaxy of germanium
DIBL in enhanced dynamic threshold operation of UTBB SOI with different drain engineering at high temperatures
Type:
Conference Proceedings
Info:
2016 31st Symposium on Microelectronics Technology and Devices (SBMicro)
Date:
2016-08-29
Author Information
| Name | Institution |
|---|---|
| K.R.A. Sasaki | University of Sao Paulo |
| Eddy Simoen | IMEC |
| Cor Claeys | IMEC |
| Joao Antonio Martino | University of Sao Paulo |
Films
Film/Plasma Properties
Substrates
| SiO2 |
Notes
| 925 |