Effect of cycling on ultra-thin HfZrO4, ferroelectric synaptic weights
Type:
Journal
Info:
Neuromorph. Comput. Eng. 2 (2022) 024001
Date:
2022-03-07
Author Information
| Name | Institution |
|---|---|
| Laura Bégon-Lours | IBM Research, Zurich Research Lab |
| Mattia Halter | IBM Research, Zurich Research Lab |
| Marilyne Sousa | IBM Research, Zurich Research Lab |
| Youri Popoff | IBM Research, Zurich Research Lab |
| Diana Dávila Pineda | IBM Research, Zurich Research Lab |
| Donato Francesco Falcone | IBM Research, Zurich Research Lab |
| Zhenming Yu | IBM Research, Zurich Research Lab |
| Steffen Reidt | IBM Research, Zurich Research Lab |
| Lorenzo Benatti | UNIMORE - Dipartimento di Ingegneria 'Enzo Ferrari' |
| Francesco Maria Puglisi | UNIMORE - Dipartimento di Ingegneria 'Enzo Ferrari' |
| Bert Jan Offrein | IBM Research, Zurich Research Lab |
Films
Film/Plasma Properties
Characteristic: Thickness
Analysis: XRR, X-Ray Reflectivity
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: GIXRD, Grazing Incidence X-Ray Diffraction
Characteristic: Microstructure
Analysis: TEM, Transmission Electron Microscope
Characteristic: Ferroelectricity
Analysis: Ferroelectrical Testing
Substrates
| SiO2 |
Notes
| 1684 |