Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Francesco Maria Puglisi Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Francesco Maria Puglisi returned 2 record(s).

NumberTitle
1Effect of cycling on ultra-thin HfZrO4, ferroelectric synaptic weights
2Scaled, Ferroelectric Memristive Synapse for Back-End-of-Line Integration with Neuromorphic Hardware