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Effect of cycling on ultra-thin HfZrO4, ferroelectric synaptic weights

Type:
Journal
Info:
Neuromorph. Comput. Eng. 2 (2022) 024001
Date:
2022-03-07
DOI:
http://dx.doi.org/10.1088/2634-4386/ac5b2d

Author Information

Name Institution
Laura Bégon-LoursIBM Research, Zurich Research Lab
Mattia HalterIBM Research, Zurich Research Lab
Marilyne SousaIBM Research, Zurich Research Lab
Youri PopoffIBM Research, Zurich Research Lab
Diana Dávila PinedaIBM Research, Zurich Research Lab
Donato Francesco FalconeIBM Research, Zurich Research Lab
Zhenming YuIBM Research, Zurich Research Lab
Steffen ReidtIBM Research, Zurich Research Lab
Lorenzo BenattiUNIMORE - Dipartimento di Ingegneria 'Enzo Ferrari'
Francesco Maria PuglisiUNIMORE - Dipartimento di Ingegneria 'Enzo Ferrari'
Bert Jan OffreinIBM Research, Zurich Research Lab

Films

Plasma TiN

Hardware used: Unknown
TDMATi, tetrakis(dimethylamido)titanium, titanium dimethylamide, (Me2N)4Ti
CAS#: 3275-24-9
N2, Nitrogen
CAS#: 7727-37-9
Deposition Temperature = 300C

Plasma WO3

Hardware used: Unknown
BTBMW, TBIDMW, bis(t-Butylimido) bis(DiMethylamido) Tungsten
CAS#: 406462-43-9
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 375C

Plasma HfZrO2

Hardware used: Unknown
TEMAHf, tetrakis(ethylmethylamido) Hafnium, hafnium ethylmethylamide, (EtMeN)4Hf
CAS#: 352535-01-4
ZrCMMM, (MeCp)2Zr(OMe)(Me), Bis(methyl-η5-cyclopentadienyl)methoxymethyl zirconium
CAS#: 916597-01-8
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 300C

Film/Plasma Properties

Characteristic: Thickness
Analysis: XRR, X-Ray Reflectivity
Diagnostic: Bruker D8 Discover

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: GIXRD, Grazing Incidence X-Ray Diffraction
Diagnostic: Bruker D8 Discover

Characteristic: Microstructure
Analysis: TEM, Transmission Electron Microscope
Diagnostic: JEOL JEM ARM 200

Characteristic: Ferroelectricity
Analysis: Ferroelectrical Testing
Diagnostic: -

Substrates

SiO2

Notes

1684