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Publication Information
Title:
Analysis of titanium species in titanium oxynitride films prepared by plasma enhanced atomic layer deposition
Type:
Journal
Info:
Surface & Coatings Technology (2016)
Date:
2016-11-25
Author Information
Name | Institution |
---|---|
Małgorzata Kot | Brandenburg University of Technology |
Karsten Henkel | Brandenburg University of Technology |
Chittaranjan Das | Brandenburg University of Technology |
Simone Brizzi | Brandenburg University of Technology |
Irina Kärkkänen | Sentech Instruments GmbH |
Jessica Schneidewind | Sentech Instruments GmbH |
Franziska Naumann | Sentech Instruments GmbH |
Hassan Gargouri | Sentech Instruments GmbH |
Dieter Schmeißer | Brandenburg University of Technology |
Films
Film/Plasma Properties
Substrates
Keywords
Notes
917 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |