Publication Information

Title:
Analysis of titanium species in titanium oxynitride films prepared by plasma enhanced atomic layer deposition
Type:
Journal
Info:
Surface & Coatings Technology (2016)
Date:
2016-11-25

Author Information

Name Institution
Małgorzata KotBrandenburg University of Technology
Karsten HenkelBrandenburg University of Technology
Chittaranjan DasBrandenburg University of Technology
Simone BrizziBrandenburg University of Technology
Irina KärkkänenSentech Instruments GmbH
Jessica SchneidewindSentech Instruments GmbH
Franziska NaumannSentech Instruments GmbH
Hassan GargouriSentech Instruments GmbH
Dieter SchmeißerBrandenburg University of Technology

Films


Plasma TiON


Film/Plasma Properties

Substrates

Keywords

Notes

917