Title: Analysis of titanium species in titanium oxynitride films prepared by plasma enhanced atomic layer deposition
Type: Journal
Info: Surface & Coatings Technology (2016)
Date: 2016-11-25
DOI: http://dx.doi.org/10.1016/j.surfcoat.2016.11.094
Name
Institution
Brandenburg University of Technology
Brandenburg University of Technology
Brandenburg University of Technology
Brandenburg University of Technology
Sentech Instruments GmbH
Sentech Instruments GmbH
Sentech Instruments GmbH
Sentech Instruments GmbH
Brandenburg University of Technology
Characteristic
Analysis
Diagnostic
917
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