The publication database currently has 1695 entries.
Use Advanced Search for more complex searches
Recent Database Additions
Infrared single-photon sensitivity in atomic layer deposited superconducting nanowires
Effects of deposition temperature on the wear behavior and material properties of plasma enhanced atomic layer deposition (PEALD) titanium vanadium nitride thin films
Gallium nitride thin films by microwave plasma-assisted ALD
Ferroelectricity of HfxZr1-xO2 thin films fabricated by 300°C low temperature process with plasma-enhanced atomic layer deposition
Hydrogen-induced abstraction mechanism of surface methyl groups in atomic-layer-epitaxy of germanium
Analysis of titanium species in titanium oxynitride films prepared by plasma enhanced atomic layer deposition
Type:
Journal
Info:
Surface & Coatings Technology (2016)
Date:
2016-11-25
Author Information
| Name | Institution |
|---|---|
| Małgorzata Kot | Brandenburg University of Technology |
| Karsten Henkel | Brandenburg University of Technology |
| Chittaranjan Das | Brandenburg University of Technology |
| Simone Brizzi | Brandenburg University of Technology |
| Irina Kärkkänen | Sentech Instruments GmbH |
| Jessica Schneidewind | Sentech Instruments GmbH |
| Franziska Naumann | Sentech Instruments GmbH |
| Hassan Gargouri | Sentech Instruments GmbH |
| Dieter Schmeißer | Brandenburg University of Technology |
Films
Film/Plasma Properties
Substrates
Notes
| 917 |