Search Plasma ALD Publication Database By...

Publication Information

Title: Analysis of titanium species in titanium oxynitride films prepared by plasma enhanced atomic layer deposition

Type: Journal

Info: Surface & Coatings Technology (2016)

Date: 2016-11-25

DOI: http://dx.doi.org/10.1016/j.surfcoat.2016.11.094

Author Information

Name

Institution

Brandenburg University of Technology

Brandenburg University of Technology

Brandenburg University of Technology

Brandenburg University of Technology

Sentech Instruments GmbH

Sentech Instruments GmbH

Sentech Instruments GmbH

Sentech Instruments GmbH

Brandenburg University of Technology

Films

Plasma TiON using SENTECH

Deposition Temperature Range N/A

3275-24-9

7727-37-9

Plasma TiON using SENTECH

Deposition Temperature Range N/A

546-68-9

7664-41-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Substrates

Keywords

Notes

917

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. If you know of publications I have missed or a database entry is wrong, send me an email at: marksowa@plasma-ald.com

Follow plasma-ald.com on Twitter

Follow @PlasmaALDGuy

Shortcuts



© 2014-2018 plasma-ald.com