SENTECH Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using SENTECH hardware returned 21 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Advances in the fabrication of graphene transistors on flexible substrates
2	Ag films grown by remote plasma enhanced atomic layer deposition on different substrates
3	Analysis of nitrogen species in titanium oxynitride ALD films
4	Analysis of titanium species in titanium oxynitride films prepared by plasma enhanced atomic layer deposition
5	Atomic Layer Deposition of Al2O3 Thin Films for Metal Insulator Semiconductor Applications on 4H-SiC
6	Breakdown and Protection of ALD Moisture Barrier Thin Films
7	Capacitance and conductance versus voltage characterization of Al2O3 layers prepared by plasma enhanced atomic layer deposition at 25°C<T<200°C
8	Comparative study of ALD SiO2 thin films for optical applications
9	Crystalline growth of AlN thin films by atomic layer deposition
10	Ellipsometry and XPS comparative studies of thermal and plasma enhanced atomic layer deposited Al2O3-films
11	Flexible, light trapping substrates for organic photovoltaics
12	Laminated Al2O3-HfO2 layers grown by atomic layer deposition for microelectronics applications
13	Localized defect states and charge trapping in atomic layer deposited-Al2O3 films
14	Long-term ambient surface oxidation of titanium oxynitride films prepared by plasma-enhanced atomic layer deposition: An XPS study
15	Moisture barrier properties of thin organic-inorganic multilayers prepared by plasma-enhanced ALD and CVD in one reactor
16	Negative charge trapping effects in Al2O3 films grown by atomic layer deposition onto thermally oxidized 4H-SiC
17	Organic narrowband near-infrared photodetectors based on intermolecular charge-transfer absorption
18	Plasma enhanced atomic layer deposition of Al2O3 gate dielectric thin films on AlGaN/GaN substrates: The role of surface predeposition treatments
19	Plasma-enhanced atomic layer deposition of titanium oxynitrides films: A comparative spectroscopic and electrical study
20	Thermal and plasma enhanced atomic layer deposition of TiO2: Comparison of spectroscopic and electric properties
21	Three dimensional ALD of TiO2 for in-vivo biomedical sensor applications

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