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Search 1536 plasma ALD publications by:
Publication Information
Title:
Long-term ambient surface oxidation of titanium oxynitride films prepared by plasma-enhanced atomic layer deposition: An XPS study
Type:
Journal
Info:
Journal of Vacuum Science & Technology A 36, 01A114 (2018)
Date:
2017-11-16
Author Information
Name | Institution |
---|---|
Małgorzata Kot | Brandenburg University of Technology |
Justyna Łobaza | Brandenburg University of Technology |
Franziska Naumann | Sentech Instruments GmbH |
Hassan Gargouri | Sentech Instruments GmbH |
Karsten Henkel | Brandenburg University of Technology |
Dieter Schmeißer | Brandenburg University of Technology |
Films
Film/Plasma Properties
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Compositional Depth Profiling
Analysis: ARXPS, Angle Resolved X-ray Photoelectron Spectroscopy
Substrates
Si(001) |
Keywords
Notes
1097 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |