Title: Long-term ambient surface oxidation of titanium oxynitride films prepared by plasma-enhanced atomic layer deposition: An XPS study
Type: Journal
Info: Journal of Vacuum Science & Technology A 36, 01A114 (2018)
Date: 2017-11-16
DOI: http://dx.doi.org/10.1116/1.5003356
Name
Institution
Brandenburg University of Technology
Brandenburg University of Technology
Sentech Instruments GmbH
Sentech Instruments GmbH
Brandenburg University of Technology
Brandenburg University of Technology
3275-24-9
Characteristic
Analysis
Diagnostic
Chemical Composition, Impurities
XPS, X-ray Photoelectron Spectroscopy
Unknown
Compositional Depth Profiling
ARXPS, Angle Resolved X-ray Photoelectron Spectroscopy
Unknown
Si(001)
1097
© 2014-2019 plasma-ald.com