Karsten Henkel Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Karsten Henkel returned 9 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Analysis of nitrogen species in titanium oxynitride ALD films
2	Analysis of titanium species in titanium oxynitride films prepared by plasma enhanced atomic layer deposition
3	Capacitance and conductance versus voltage characterization of Al2O3 layers prepared by plasma enhanced atomic layer deposition at 25°C<T<200°C
4	Comparison of plasma-enhanced atomic layer deposition AlN films prepared with different plasma sources
5	Ellipsometry and XPS comparative studies of thermal and plasma enhanced atomic layer deposited Al2O3-films
6	In-gap states in titanium dioxide and oxynitride atomic layer deposited films
7	Localized defect states and charge trapping in atomic layer deposited-Al2O3 films
8	Long-term ambient surface oxidation of titanium oxynitride films prepared by plasma-enhanced atomic layer deposition: An XPS study
9	Plasma-enhanced atomic layer deposition of titanium oxynitrides films: A comparative spectroscopic and electrical study

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