Karsten Henkel Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Karsten Henkel returned 11 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Analysis of nitrogen species in titanium oxynitride ALD films
2Analysis of titanium species in titanium oxynitride films prepared by plasma enhanced atomic layer deposition
3Capacitance and conductance versus voltage characterization of Al2O3 layers prepared by plasma enhanced atomic layer deposition at 25°C<T<200°C
4Comparison of plasma-enhanced atomic layer deposition AlN films prepared with different plasma sources
5Ellipsometry and XPS comparative studies of thermal and plasma enhanced atomic layer deposited Al2O3-films
6In situ real-time and ex situ spectroscopic analysis of Al2O3 films prepared by plasma enhanced atomic layer deposition
7In-gap states in titanium dioxide and oxynitride atomic layer deposited films
8Localized defect states and charge trapping in atomic layer deposited-Al2O3 films
9Long-term ambient surface oxidation of titanium oxynitride films prepared by plasma-enhanced atomic layer deposition: An XPS study
10Low-temperature growth of gallium oxide thin films by plasma-enhanced atomic layer deposition
11Plasma-enhanced atomic layer deposition of titanium oxynitrides films: A comparative spectroscopic and electrical study