Franziska Naumann Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Franziska Naumann returned 9 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Analysis of nitrogen species in titanium oxynitride ALD films
2Analysis of titanium species in titanium oxynitride films prepared by plasma enhanced atomic layer deposition
3Comparison of plasma-enhanced atomic layer deposition AlN films prepared with different plasma sources
4Ellipsometry and XPS comparative studies of thermal and plasma enhanced atomic layer deposited Al2O3-films
5In situ real-time and ex situ spectroscopic analysis of Al2O3 films prepared by plasma enhanced atomic layer deposition
6In-gap states in titanium dioxide and oxynitride atomic layer deposited films
7Long-term ambient surface oxidation of titanium oxynitride films prepared by plasma-enhanced atomic layer deposition: An XPS study
8Low-temperature growth of gallium oxide thin films by plasma-enhanced atomic layer deposition
9Plasma-enhanced atomic layer deposition of titanium oxynitrides films: A comparative spectroscopic and electrical study