Franziska Naumann Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Franziska Naumann returned 9 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Analysis of titanium species in titanium oxynitride films prepared by plasma enhanced atomic layer deposition
2Analysis of nitrogen species in titanium oxynitride ALD films
3Low-temperature growth of gallium oxide thin films by plasma-enhanced atomic layer deposition
4In-gap states in titanium dioxide and oxynitride atomic layer deposited films
5Plasma-enhanced atomic layer deposition of titanium oxynitrides films: A comparative spectroscopic and electrical study
6Ellipsometry and XPS comparative studies of thermal and plasma enhanced atomic layer deposited Al2O3-films
7In situ real-time and ex situ spectroscopic analysis of Al2O3 films prepared by plasma enhanced atomic layer deposition
8Long-term ambient surface oxidation of titanium oxynitride films prepared by plasma-enhanced atomic layer deposition: An XPS study
9Comparison of plasma-enhanced atomic layer deposition AlN films prepared with different plasma sources