Franziska Naumann Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Franziska Naumann returned 9 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1In-gap states in titanium dioxide and oxynitride atomic layer deposited films
2Plasma-enhanced atomic layer deposition of titanium oxynitrides films: A comparative spectroscopic and electrical study
3Analysis of nitrogen species in titanium oxynitride ALD films
4Long-term ambient surface oxidation of titanium oxynitride films prepared by plasma-enhanced atomic layer deposition: An XPS study
5Comparison of plasma-enhanced atomic layer deposition AlN films prepared with different plasma sources
6Low-temperature growth of gallium oxide thin films by plasma-enhanced atomic layer deposition
7Analysis of titanium species in titanium oxynitride films prepared by plasma enhanced atomic layer deposition
8In situ real-time and ex situ spectroscopic analysis of Al2O3 films prepared by plasma enhanced atomic layer deposition
9Ellipsometry and XPS comparative studies of thermal and plasma enhanced atomic layer deposited Al2O3-films