Dieter Schmeißer Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Dieter Schmeißer returned 11 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Comparison of plasma-enhanced atomic layer deposition AlN films prepared with different plasma sources
2Plasma-enhanced atomic layer deposition of titanium oxynitrides films: A comparative spectroscopic and electrical study
3Low-temperature growth of gallium oxide thin films by plasma-enhanced atomic layer deposition
4Analysis of nitrogen species in titanium oxynitride ALD films
5In-gap states in titanium dioxide and oxynitride atomic layer deposited films
6Long-term ambient surface oxidation of titanium oxynitride films prepared by plasma-enhanced atomic layer deposition: An XPS study
7Ellipsometry and XPS comparative studies of thermal and plasma enhanced atomic layer deposited Al2O3-films
8Analysis of titanium species in titanium oxynitride films prepared by plasma enhanced atomic layer deposition
9Localized defect states and charge trapping in atomic layer deposited-Al2O3 films
10Capacitance and conductance versus voltage characterization of Al2O3 layers prepared by plasma enhanced atomic layer deposition at 25°C<T<200°C
11Graphene oxide monolayers as atomically thin seeding layers for atomic layer deposition of metal oxides