Małgorzata Kot Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Małgorzata Kot returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Analysis of titanium species in titanium oxynitride films prepared by plasma enhanced atomic layer deposition
2Comparison of plasma-enhanced atomic layer deposition AlN films prepared with different plasma sources
3In-gap states in titanium dioxide and oxynitride atomic layer deposited films
4Localized defect states and charge trapping in atomic layer deposited-Al2O3 films
5Long-term ambient surface oxidation of titanium oxynitride films prepared by plasma-enhanced atomic layer deposition: An XPS study